Repair Environment
修理环境
最适宜Refurbishment的优良洁净室
专为System Test而打造的Facility & Utility System
使用N2, He gas 进行 Wafer seasoning 及Plasma test
Repair Environment
• 最适宜Refurbishment的优良洁净室
• 专为System Test而打造的Facility & Utility System
• 进行 Wafer seasoning 及Plasma test